Spare Parts

SUSS MicroTec ReMan GmbH will offer a wide range of original source parts as well as second source parts for Mask Aligner, Flood Exposure Systems, Bonders, Coaters and Developers.

SUSS MicroTec ReMan GmbH will provide a guarantee that all parts manufactured by SMTR, or to SMTR's specifications and drawings, are free from any defects in material and workmanship.

SUSS MicroTec ReMan GmbH will also supply original consumable parts of all known SUSS MicroTec lithography equipment and of course for all refurbished equipment.

Following we would like to give you a short overview of our SUSS mask holder and SUSS chucks. Please notice that this is only a short pullout of our stock