Mask Aligner
Unmatched Precision for Thin and Thick Film Applications
The SUSS Mask Aligner has become synonymous with superior quality, accuracy, and high quality exposure equipment. SUSS MicroTec offers a complete range of mask aligners for high-end fab automation, volume production and R&D environments alike. The new mask aligner generation from SUSS processes wafers up to 300mm and can be equipped with technologies that significantly increase throughput, achieve 1 micron resolution and sub-micron overlay and significantly reduce lithography costs. SUSS Mask Aligners provide a flexible and economic alternative to expensive stepper technology and are regarded as the system of choice for many enabling technologies such as MEMS, Wafer Level Packaging or Compound Semiconductors.
Production Mask Aligners
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MA150In stock
wafers: up to 6"
1000W - 350W exposure lamp› read more... -
MA150MIn stock
wafers: up to 6"
1000W - 350W exposure lamp› read more... -
MA150CCIn stock
wafers: up to 6"
1000W - 350W exposure lamp› read more...
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MA200In stock
wafers: up to 8"
1000W - 350W exposure lamp
cassette loader› read more... -
MA1006Sold
wafers: up to 6"› read more...
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MA25In stock
wafers: up to 5"
350W double side exposure system› read more...
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MA56/5In stock
wafers: up to 5"
350W exposure lamp
cassette loader› read more... -
MA4/6In stock
wafers: up to 6"
250W exposure lamp
CIC power supply› read more...
Manual Mask Aligners
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MJB3In stock
wafers: up to 3"
350W exposure lamp
Infrared› read more... -
MJB21In stock
wafers: up to 3"
200W double side exposure system
cassette loader
CP power supply › read more... -
MJB4Sold
wafers: up to 8"
substrates: 1"x1"-8"x8"› read more...
Lab Aligners
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MA45In stock
wafers: up to 4"
350W exposure lamp
UV400 CP power supply
manual loading› read more...