Production Mask Aligner - MA56/5
Features and Benefits
- Proximity exposure mode
- Hard- and soft contact
- Vacuum contact
- Cassette system with pre-alignment station
- Optional: M – Manual version available
The SUSS MA56 is ideal for the production environment. Features include: Automatic pre-alignment with optical flat finder (accuracy ±15µm). High precision, step motor actuated alignment stage. Diffraction reducing SUSS exposure system and cassette-to-cassette operation. Choice of high resolution microscopes, specifically designed for mask alignment.
