Production Mask Aligner - MA4/6
Features and Benefits
- For research, laboratories, limited and pilot production
- Wafer size up to 6”
- All contact exposure processes
- Highly sensitive and fragile materials
- Thick substrates
The high performance mask aligners for contact exposure processes. Resolution far into the submicron region for silicon and compound semiconductors up to 100mm / 150mm. Substrates and partial wafers up to 4” x 4” / 6” x 6”.
